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Final Polishing Pads - Suede Type Series


The Suede type series from Fujibo categorize themselves as final polishing pads.
These pads main application are for wafer polishing.

POLYPAS #191 is used for low-pressure polishing and is suitable for the final polishing stage of silicon, GaAs, and InP wafers, as well as texturing Ni-P plated hard disks. The nap layer is significantly soft and consists of fine pores. This pad has excellent resistance to acid and alkaline.

POLYPAS #194 utilizes a nap layer that consists of large, rigid pores that are ideal for low- to medium- pressure polishing. This pad is also used for the first and second stages of silicon, GaAs, and InP wafer polishing as well as rough polishing of Ni-P plated hard disks.

POLYPAS #210 is made of the most durable polishing material and performs well when used in conjunction with chemicals. Due to the small pore size, this pad is effective in various polishing applications that involve silicon wafers, glass, Ni-P plated hard disks, and stainless steel. It also provides long life.

POLYPAS #210 (NB) - With a very durable micro-porous inner layer, this pad's absorbency ensures a perfect surface finish. To ensure excellent micro waviness and flatness, this pad is available in several base materials: non-woven cloth, soft PVC, and PET.

POLYPAS #250 is designed for ultra-fine polishing of silicon wafers, glass, and Ni-P plated hard disks. This pad has a much softer nap layer and finer pores than POLYPAS #210, and works well with chemicals.

POLYPAS #27, designed for extensive use in low to medium pressure polishing, is the best pad for the final polishing stage of silicon and GaAs wafers. This pad is also the best choice for texturing Ni-P plated hard disks because it has the softest nap layer, high compressibility, and high elasticity.

POLYPAS #7000 - By improving the inner foam layer, Fujibo has successfully engineered this multi-purpose, high-quality pad. It has a durable, even surface that guarantees high performance results. The nap hardness can be adjusted to meet your requirements.


Base Material Option

Available with a choice of non-woven, soft PVC (SP), Hard PVC (SPH), or PET base material. Please contact Marubeni Sunnyvale for more information.


Specifications

Product Number #191 #194 #210 #250 #27 #7000 #210NB
Total Thickness 1.2 1.2 1.2 1.2 1.1 1.1 1.3
Nap Thickness 450 450 480 480 380 380 480
Nap Hardness 16 44 28 18 16 28 28
Cornpressibility 25 10 15 16 25 10 15
Elasticity 88 83 87 85 94 89 85
Total Hardness 45 55 46 44 40 50 45

Note: The values above represent typical measurements. Actual values may vary in a range defined by product specifications.

  • Hardness measurements according to the Shore A gauge
  • Other measurement methods according to J1SK6505
Contact Marubeni Sunnyvale

For more information on final polishing pads or other POLYPAS series, please contact Marubeni Sunnyvale and we will send you a full brochure.